Silicon Carbide

Total Solution Provider

Silicon Carbide

WDX™ Silicon Carbide Materials are useful in a wide variety of industries and applications such as semiconductor processing parts including focus and edge rings, wafer boats, and arms, sealing components, blasting nozzles, and armor plates. Components made of WDX™ Silicon Carbide Materials have an excellent track record over decades of use, and applications for these versatile materials continue to expand. Our experienced scientists work to develop silicon carbide-based solutions tailored to customers' requirements.

The Differences among Silicon Carbide Grades
WDX offers six grades of silicon carbide, each exhibiting various properties. Differences are described below.

The multi-purpose grade: WDX™ Silicon Carbide Grade S
WDX™ SIC-S is a sintered alpha silicon carbide material designed for multi-purpose applications. The material has good chemical resistance, high hardness, excellent flexural strength, and high thermal conductivity properties.

The electrically conductive grade: WDX™ Silicon Carbide Grade D
WDX™ SIC-D is a sintered alpha silicon carbide material designed for electrically conductive materials applications and low specific weight WDX™ SIC-D has proven highly effective in complex-shaped components and semiconductor processing parts.

The CVD-SIC grade: WDX™ Silicon Carbide Grade CVD-A
WDX produces CVD grade silicon carbide material which outperforms any silicon carbide in plasma environments. WDX™ CVD-A extends the life of your manufacturing equipment, eliminates contamination and increases yields.

The Reaction-Bonded Silicon Carbide grades: L-RSIC, M-RSIC, and H-RSIC
WDX produces three different reaction-bonded silicon carbide grades, L-RSIC, M-RSIC, and H-RSIC. The RSIC grades are designed specifically for optimum performance in focusledge ring applications for semiconductor processing. The electrical resistivities of LRSC, M-RSIC, and H-RSIC are on the orders of 10°, 10, and 10-1 cm, respectively. Compared to other reaction-bonded silicon carbide materials on the market, RSC materials from WDX are characterized by a low free Si contents and homogeneous microstructures, thus higher flexural strengths. The RSIC materials show good performance as seals for use in pumps.

Typical Material Properties of WDX™ Silicon Carbide

Property Unit Typical Values
L-RSiC M-RSiC H-RSiC S-SiC D-SiC CVD-A
Density g/cm³ 2.93 3.01 3.08 3.18 2.90 3.21
Flexural Strength MPa 420 550 500 550 430 500
Vickers Hardness GPa 20.8 26.4 20.7 27.6 24.3 -
Poisson’s Ratio - 0.173 0.179 0.27 0.46 0.132 -
Thermal Conductivity (@25℃) W/m∙K 119 164 169 150 124 267
Specific Heat (@100℃) J/g∙K 0.657 0625 0.763 0.679 0.778 -
Thermal Expansion 10-6·K-1 4.4 4.11 4.1 4.1 4.9 -
Volume Resistivity (@25℃) Ohm∙cm ~10-3 ~10-2 ~10-1 106~109 0.2 < 10
> 1000

WDX™ Silicon Carbide : Wafer Boat

WDX™ Silicon Carbide : Focus Ring

WDX™ L-RSIC

WDX™ CVD-A

WDX™ Silicon Carbide : Pick-up Tool

SiC

Product Name SiC Ring Susceptor SiC Boat
Product Description Parts to maintain etching
uniformity by keeping
plasma consistent at the
outer boundaries of the wafer		 Thin Film parts of wafer in
Epi process		 Parts that safely position
several wafers in order to
coat thin oxide film during process
Application Etcher process Thin Film process CVD process, Diffusion process, etc.
Type Focus Ring, Insert Ring,
Edge Ring (Hot, cool)		 8” / 12” Susceptor Baffle Boat, 8” / 12” Long Boat