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Quartz is widely used as parts material in semiconductor and solar power industries due to its outstanding high temperature stability, chemical resistance and corrosion resistance. In the processing of semiconductors, Quartz-parts are used in the Etching and Diffusion process due to its characteristic of highly purified quartz glass fiber
and our Quartz-parts are primarily used in the Etching process.
Key Quarts-parts manufactured from our company include Rings (Focus Ring, 2-step Ring), GDP, Bell Jar, Caps, etc.
Focus Ring
2-step Ring
Other Ring
| Product Name | Focus Ring | 2-step Ring | Other Ring |
|---|---|---|---|
| Product Description | ESC protection and Plasma density control | Role of controlling Plasma pressure | Role of controlling internal Gas pressure |
| Application | Semiconductor Oxide Etch | ||
| Type |
Inner Focus Ring Top Edge Ring Cover Ring |
Shield Ring Combo Ring |
Confinement Ring Wap Ring Pressure Control Ring |
Quartz Tube
Quartz Boat
Quartz other parts
| Product Name | Quartz Tube | Quartz Boat | Quartz other parts |
|---|---|---|---|
| Product Description | Role of protecting external contamination and Gas channel | Role of container for transportation to the high temperature substance melting and wafer process | Electrodes for diffusion of GAS |
| Application | Entire semiconductor structure | Dry Etch Diffusion process of semiconductor | Entire semiconductor structure |
| Type |
Inner Tube Protect Tube Gas feed Tube |
Boat Ramco LOT Boat |
Quartz G.D.P Shower Plate |
Address: 53-77 4-Gongdan-ro 7-gil, Gumi-si, Gyeongbuk (Gupo-dong)Tel: 054-710-2300 ~ 2301Fax: 054) 456-9983
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